Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning
نویسندگان
چکیده
منابع مشابه
Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning
We demonstrate strain-controlled gratings made of an organic elastomer, polydimethylsiloxane sPDMSd, which can achieve optical wavelength tuning by varying their spatial periods. The whole device structure presented in this work incorporates a nanoimprinted PDMS grating integrated with electrostatic microelectromechanical systems actuators on a silicon chip. The fabrication of the device combin...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2005
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1900923